Integrated optic glass microcantilevers with Bragg grating interrogation.

A new method for creating microcantilevers in glass allows integration of optical waveguides and Bragg gratings. Devices are fabricated by high precision sawing, followed by direct UV writing of waveguides with Bragg gratings and then chemical etching to release the freestanding glass structures. Optical measurement of the Bragg gratings together with piezo-actuation allows the mechanical resonances to be probed. By measuring the mechanical damping coefficient of the cantilever as a function of the gas pressure in a vacuum system the transition from the viscous to the molecular flow regime can be observed.