Micro/nano surface modification on brittle materials by tribo nanolithography using PCD tool.

In this study, brittle materials were mechanically modified under precise normal force control at the mN approximately microN level using PCD tools as a nano tool. The lab-made PCD attached micro cantilevers were customized for tribo nanolithography. The machined patterns were measured under an atomic force microscope (AFM) to obtain the machining characteristics of the samples for each set of conditions. Then the samples were etched using aqueous solution to verify the etch characteristics of the machined surface. Our results showed that either protruding or depressed patterns could be generated on the scratched surface by controlling normal load, scan pitch, and etching condition. The unique mask effect of brittle material after mechanical scratching under PCD tool can be controlled by the conventional mechanical machining conditions such as chip formation, plastic flow, and material removal. We used SEM, TEM, SIMS, and AFM to investigate the etch characteristics and structural change of brittle material under nano scale mechanical machining conditions.