AI Article Synopsis
- Spectrally resolved white-light phase-shifting interference microscopy is used to measure the thickness of a transparent thin film on a patterned structure with uneven features.
- The technique employed involves spectrally resolved optical coherence tomography, which simplifies thickness profile measurement along a specific line.
- The process relies on inverse Fourier transformation of the complex spectral interference function to derive the thickness profile directly.
Article Abstract
Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.
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| http://dx.doi.org/10.1364/AO.49.006624 | DOI Listing |
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