AI Article Synopsis
- The Fabry-Pérot interferometer has a simple optical setup and is widely used for measurement applications.
- The performance of the interferometer, particularly in displacement measurement, is affected by tilt angles of the measurement mirror, limiting its effective range.
- This study aims to improve the measuring range by compensating for tilt angles, demonstrating high stability and accuracy with a maximum deviation of less than 0.3 μm over a 30 mm range.
Article Abstract
The optical configuration of a Fabry-Pérot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Pérot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Pérot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Pérot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Pérot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 μm in the traveling range of 30 mm. The experimental results show that the Fabry-Pérot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order.
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| http://dx.doi.org/10.1063/1.3480551 | DOI Listing |
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