Deconvolution of charged particle spectra from neutron depth profiling using Simplex method.

Neutron depth profiling (NDP), based on neutron induced nuclear reactions, is a well known, nondestructive technique for the determination of the concentration depth profiles of some isotopes in the surface layers of solids. The profile determination consists of deconvolution of a relevant part of the energy spectra of the charged reaction products. Several solutions have been suggested for this problem. In this work, an alternative computer code (LIBOR), which makes use of the Simplex minimization technique for the deconvolution of the NDP spectra, is described and its performance is documented on several examples.