AI Article Synopsis
- The study focuses on the theoretical and experimental aspects of waveguiding layer acoustic waves (WLAW) using an AlN/ZnO/diamond structure.
- It utilizes finite element method (FEM) modeling to determine optimal thicknesses for the AlN and ZnO layers to minimize surface displacement and effectively confine acoustic waves.
- The developed experimental device successfully demonstrates WLAW at a frequency of 412 MHz, highlighting the electromechanical properties based on the specified layer thicknesses.
Article Abstract
We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3lambda/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2lambda must be larger than lambda/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around lambda/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz.
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| http://dx.doi.org/10.1109/TUFFC.2010.1620 | DOI Listing |
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