In order to carry out precise measurements of the thickness of a dielectric layer deposited on a metal surface, we have introduced an ellipsometric measurement technique (EMT) to the modified Otto's configuration (MOC) that is used for observing surface plasmon resonance (SPR). For that purpose, we have measured the thickness of the Au layer by the EMT at four different locations on an elliptic fringe pattern obtained from the MOC basing on a four-layer structure model: prism (BK7)-air-Ausubstrate (BK7). Then, we have measured that of a TiO(2) layer deposited on the Au layer by the EMT basing on a five-layer structure model: prism (BK7)-air-TiO(2)-Au-substrate (BK7). We have found experimentally that the combination of EMT and MOC is effective for measuring the thickness of the dielectric layer on the metal.
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