Controlled positioning of large interfacial nanocavities via stress-engineered void localization.

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Nanotechnology Group Institute of Microsystems Engineering (IMTEK), Albert-Ludwigs-University Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany.

Published: August 2010

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http://dx.doi.org/10.1002/smll.201000561DOI Listing

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