Nanograting-based compact vacuum ultraviolet spectrometer and beam profiler for in situ characterization of high-order harmonic generation light sources.

A compact, versatile device for vacuum ultraviolet (VUV) beam characterization is presented. It combines the functionalities of a VUV spectrometer and a VUV beam profiler in one unit and is entirely supported by a standard DN200 CF flange. The spectrometer employs a silicon nitride transmission nanograting in combination with a microchannel plate-based imaging detector. This enables the simultaneous recording of wavelengths ranging from 10 to 80 nm with a resolution of 0.25-0.13 nm. Spatial beam profiles with diameters up to 10 mm are imaged with 0.1 mm resolution. The setup is equipped with an in-vacuum translation stage that allows for in situ switching between the spectrometer and beam profiler modes and for moving the setup out of the beam. The simple, robust design of the device is well suited for nonintrusive routine characterization of emerging laboratory- and accelerator-based VUV light sources. Operation of the device is demonstrated by characterizing the output of a femtosecond high-order harmonic generation light source.