3D in vivo optical imaging on a mouse has been obtained using a 2D MEMS mirror for lateral scanning in a time-domain optical coherence tomography (OCT) system. The MEMS mirror aperture size is 1 x 1 mm(2), and the device footprint is 2 x 2 mm(2). The MEMS mirror scans +/- 30 degrees optical angles about both x and y-axis at only 5.5V DC voltage. An endoscopic probe with an outer diameter of 5.8 mm has been designed, manufactured and packaged. The probe scans an average transverse area of 2 mm x 2 mm. The imaging speed of the probe is about 2.5 frames per second, limited by the speed of the employed optical delay line.
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http://dx.doi.org/10.1364/OE.18.012065 | DOI Listing |
Micromachines (Basel)
November 2024
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion axis of electrostatic MEMS micromirrors to detect the deflection angle. The design uses a multi-layer bonding process to realize a vertical comb-driven structure.
View Article and Find Full Text PDFNanophotonics
November 2024
State Key Laboratory of Optical Communication Technologies and Networks, China Information Communication Technologies Group Corporation (CICT), Wuhan, China.
Beam-steered infrared (IR) light communication has gained tremendous attention as one of the solutions of congested wireless communication traffic. High performance active beam-steering devices play a crucial role in data allocation and exchange. Conventional beam-steering devices such as spatial light modulator (SLM) and micro-electrical mechanical system (MEMS) mirror and the current emerging nonmechanical beam-steering metasurface-based devices are challenging to realize a large tunable steering angle beyond several degrees, which significantly hinders the spatial application of optical wireless communications (OWC).
View Article and Find Full Text PDFMicrosyst Nanoeng
November 2024
PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
High-precision geophones play crucial roles in terrestrial applications such as oil and gas exploration as well as seismic monitoring. The development of optomechanical precision measurements provides a new design method for geophones, offering higher sensitivity and smaller dimensions compared to traditional geophones. In this work, we introduce an optomechanical microelectromechanical system (MEMS) geophone based on a plano-concave Fabry‒Perot (F-P) microcavity, which has a high sensitivity of 146 V/g.
View Article and Find Full Text PDFSci Adv
November 2024
Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark.
Compared to conventional lasers limited to generating static modes, mode-switchable lasers equipped with adjustable optics significantly enhance the flexibility and versatility of coherent light sources. However, most current approaches to achieving mode-switchable lasers depend on conventional, i.e.
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