In an interferometer which uses a reference surface, the measured surface heights correspond to the difference between the test and reference surfaces. To accurately determine the rms roughness of supersmooth surfaces, the effects of the reference surface roughness need to be removed. One technique for doing this involves averaging a number of uncorrelated measurements of a mirror to generate a reference surface profile which can then be subtracted from subsequent measurements so that they do not contain errors due to the reference surface. The other technique provides an accurate rms roughness of the surface by taking two uncorrelated measurements of the surface. These two techniques for measurement of supersmooth surfaces are described in detail, and results of the measurement of a 0.7-A rms roughness mirror are presented. The expected error in the rms roughness measurement of a supersmooth mirror due to instrument noise is 0.02 A.
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