Peak reflectivity measurements of W/C, Mo/Si, and Mo/B(4)C multilayer mirrors in the 8-190-A range using both Kalpha line and synchrotron radiation.

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B(4)C multilayer mirrors have been performed using line and synchrotron radiation in the 8-190 A wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. Mo/B(4)C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 A and bandpasses as small as 3 A.