Note: On the deconvolution of Kelvin probe force microscopy data.

In Kelvin probe force microscopy (KPFM) proper interpretation of the data is often difficult because the measured surface potential is affected by the interaction of the cantilever with the sample. In this work, the tip's interaction with a modeled surface potential distribution was simulated, leading to a calculated KPFM image. Although simplified, the calculation is capable of showing the influence of the cantilever in the correct qualitative manner, proven by a comparison with experimental data. Additionally, a deconvolution was performed on the simulated image, showing that for simple geometries revealing the "real" surface potential data is possible in principle.