Effect of surface passivation on dielectrophoresis-prepared multi-channel ZnO nanowire field effect transistor (FETs).

J Nanosci Nanotechnol

Department of Semiconductor Science and Technology, Semiconductor Physics Research Center (SPRC), Chonbuk National University, Jeonju 561-756, Korea.

Published: May 2010

We report on the effect of surface passivation on the electrical characteristics of multi-channel ZnO nanowire field-effect transistors (FETs). Surface passivation was performed using a SiO2 layer on ZnO nanowires. Multi-channel FETs were prepared by assembling as synthesized ZnO nanowires on a SiO2/Si substrate using an alternating current (AC) dielectrophoresis (DEP) technique. We observed that surface passivation with a SiO2 layer on ZnO nanowires was significantly affected by electrical characteristics of multi-channel ZnO nanowire FETs such as the threshold voltage and transconductance.

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http://dx.doi.org/10.1166/jnn.2010.2265DOI Listing

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