A focused laser lithographic system (FLLS) has been constructed. Details of the construction of this system and its performance are given. Results indicate that certain modifications to the system will enable it to rival much more expensive systems.

Download full-text PDF

Source
http://dx.doi.org/10.1364/AO.17.001069DOI Listing

Publication Analysis

Top Keywords

focused laser
8
laser lithographic
8
lithographic system
8
system
4
system focused
4
system flls
4
flls constructed
4
constructed details
4
details construction
4
construction system
4

Similar Publications

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!