Single crystal diamond tips with perfect pyramidal geometry were obtained by a combination of chemical vapor deposition and selective oxidation of polycrystalline films. The parameters of the deposition process were chosen to provide growth of a textured film consisting of micrometer sized diamond crystallites embedded into nanodiamond ballas-like material. The heating of the film in an air environment was used for selective oxidation of the nanodiamond component. The films obtained contain free standing pyramidal single crystal diamond tips oriented by their apexes to the substrate surface. The tips were used for the fabrication of atomic force microscopy probes and their evaluation in comparison to common silicon probes.
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