Packaging and characterization of mechanically actuated microtweezers for biomedical applications.

This paper presents the successful design, fabrication, and packaging of a mechanically actuated micro-electro-mechanical-systems (MEMS) microtweezer, and its use in a variety of biological environments. This complete and low cost MEMS system has minimal manufacturing complexity and it can be augmented to any standard micromanipulator or positioning system. Characterization of the system shows that precise and controlled tool actuation is achieved with maximal tip closing forces of 367 mN. The system's performance and ease of use can provide the means to create and enhance a multitude of experimental preparations previously not possible.