Very high frequency (beyond 100 MHz) PZT kerfless linear arrays.

IEEE Trans Ultrason Ferroelectr Freq Control

NIH Center for Ultrasonic Transducer Technol., Univ. of Southern California, Los Angeles, CA, USA.

Published: October 2009

AI Article Synopsis

  • The paper discusses the creation and testing of high-frequency kerfless linear arrays using PZT (lead zirconate titanate) film and bulk material.
  • Two types of PZT materials were utilized: a 12-microm thick film made from PZT-5H powder and a 15-microm thick ceramic sheet, both fabricated using photolithography techniques.
  • Results show that the PZT film array achieved a center frequency of 120 MHz with a bandwidth of 60% and 41 dB insertion loss, whereas the PZT ceramic sheet array had a center frequency of 128 MHz, a bandwidth of 40%, but better sensitivity at 28 dB insertion loss.

Article Abstract

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss).

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC2850572PMC
http://dx.doi.org/10.1109/TUFFC.2009.1311DOI Listing

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