We present an advanced high-resolution, compact laser lithography system for fast prototyping of complex integrated optics devices comprising microring resonators and photonic crystal structures. Precise and flexible structuring of photoresist patterns is achieved by combing three linear stages (xyz) for sample positioning and a two-dimensional acousto-optical deflector for laser beam steering and intensity control. A continuous wave diode laser operating at a wavelength of 375 nm is used to illuminate all types of photoresists including SU-8. Using a microscope objective with a numerical aperture of 1.40, structure widths of approximately 200 nm can be obtained. The write-field covered by acousto-optic deflection can be as large as 200x200 microm(2) when using an objective with a focal length of 4.5 mm. With a two-step lithography process, gaps as small as 150 nm between adjacent structures have been achieved, yielding superior photoresist masks for microring resonators with coupling ports.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1063/1.3202274 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
Multiphoton and Harmonic Imaging of Microarchitected Materials.
ACS Appl Mater Interfaces
January 2025
Laser Thermal Laboratory, Department of Mechanical Engineering, University of California, Berkeley, California 94720, United States.
Article Synopsis
- Microadditive manufacturing enables the creation of intricate nano- and microscale components, leading to advancements in various industries.
- This research explores two-photon and three-photon fluorescence imaging, along with third-harmonic generation microscopy, to analyze complex lattice structures produced by multiphoton lithography.
- The study reveals that multiphoton fluorescence imaging provides better depth penetration and nondestructive identification of internal modifications and defects, improving quality control in microadditively manufactured products.
Taking into account phase-polarization interactions is crucial for the formation of spatially structured laser beams. The effects that arise in this context can lead to the modulation of individual field components and the transformation of the overall light field. In this study, we investigate the impact of phase and polarization distributions with radial dependencies in polar coordinates on the longitudinal component of laser beams passing through a transmissive spatial light modulator (SLM) based on twisted nematic liquid crystals.
View Article and Find Full Text PDFMapping and Optically Writing Nanogap Inhomogeneities in 1-D Extended Plasmonic Nanowire-on-Mirror Cavities.
ACS Photonics
December 2024
School of Physics and Astronomy, University of Birmingham, Birmingham B15 2TT, U.K.
Tightly confined plasmons in metal nanogaps are highly sensitive to surface inhomogeneities and defects due to the nanoscale optical confinement, but tracking and monitoring their location is hard. Here, we probe a 1-D extended nanocavity using a plasmonic silver nanowire (AgNW) on mirror geometry. Morphological changes inside the nanocavity are induced locally using optical excitation and probed locally through simultaneous measurements of surface enhanced Raman scattering (SERS) and dark-field spectroscopy.
View Article and Find Full Text PDFPicometre-level surface control of a closed-loop, adaptive X-ray mirror with integrated real-time interferometric feedback.
J Synchrotron Radiat
January 2025
CAEN, Viareggio, Italy.
We provide a technical description and experimental results of the practical development and offline testing of an innovative, closed-loop, adaptive mirror system capable of making rapid, precise and ultra-stable changes in the size and shape of reflected X-ray beams generated at synchrotron light and free-electron laser facilities. The optical surface of a piezoelectric bimorph deformable mirror is continuously monitored at 20 kHz by an array of interferometric sensors. This matrix of height data is autonomously converted into voltage commands that are sent at 1 Hz to the piezo actuators to modify the shape of the mirror optical surface.
View Article and Find Full Text PDFA PDMS-Al Triboelectric Nanogenerator Using Two-Pulse Laser to Enhance Effective Contact Area and Its Application.
Polymers (Basel)
December 2024
Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan.
A triboelectric nanogenerator (TENG) is a kind of energy harvester which converts mechanical energy into electrical energy with electron transfer and transport between two different materials during cycling tribology. To increase the contact area between tribo-layers and enhance the output of TENGs, many studies prepare patterned micro/nanostructured tribo-layers using semiconductor processes like lithography and etching at high cost and with long processing times. Here, we propose a new method to quickly produce high-aspect-ratio (HAR) microneedles of polydimethylsiloxane (PDMS) for TENG triboelectric layers using a two-pulse laser-ablated polymethyl methacrylate mold and casting.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!