AI Article Synopsis
- The study investigates the interaction of radially polarized light with a solid immersion lens (SIL) setup, focusing on how it affects the electric field in the focal plane.
- It finds that radially polarized light produces smaller beam spots than circularly polarized light when projected onto the SIL's bottom surface, though it leads to broader spots on the measurement sample due to a stronger transverse electric field.
- The use of an annular aperture can minimize the transverse electric field effects, thereby enhancing resolution for applications in near-field optical storage, microscopy, and high-resolution lithography.
Article Abstract
We analyzed the behavior of the electric field in a focal plane consisting of a solid immersion lens (SIL), an air gap, and a measurement sample for radially polarized illumination in SIL-based near-field optics with an annular aperture. The analysis was based on the Debye diffraction integral and multiple beam interference. For SIL-based near-field optics whose NA is higher than unity, radially polarized light generates a smaller beam spot on the bottom surface of a SIL than circularly polarized light; however, the beam spot on the measurement sample is broadened with a more dominant transverse electric field. By introducing an annular aperture technique, it is possible to decrease the effects of the transverse electric field, and therefore the size of the beam spot on the measurement sample can be small. This analysis could have various applications in near-field optical storage, near-field microscopy, lithography at ultrahigh resolution, and other applications that use SILs for high resolution.
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| http://dx.doi.org/10.1364/ol.34.001961 | DOI Listing |
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