Deposition of tungsten nanogratings induced by a single femtosecond laser beam.

Opt Express

Center for Optoelectronics and Optical Communications, The University of North Carolina at Charlotte, 9201 University City Boulevard, Charlotte NC 28223, USA.

Published: May 2007

Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.

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http://dx.doi.org/10.1364/oe.15.005937DOI Listing

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Center for Optoelectronics and Optical Communications, The University of North Carolina at Charlotte, 9201 University City Boulevard, Charlotte NC 28223, USA.

Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.

View Article and Find Full Text PDF

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