Properties of induced polarization evanescent reflection with a solid immersion lens (SIL).

Properties of the induced polarization signal with a solid immersion lens (SIL) are investigated by experiments and simulations. A LaSFN9 SIL (NA=1.5) is used in the experiment. Physics of the induced polarization signal are described for several configurations of optical systems and substrates. Induced polarization signals from evanescent-wave coupling to dielectric, semiconductor and metal substrates are studied in detail. It is shown that surface plasmon waves are excited with Au substrates and the induced polarization signal is affected by the surface plasmon waves. Simulation results of the induced polarization signal for a gallium phosphide SIL (NA=2.64) are discussed.