AI Article Synopsis
- Refractive microlenses with over 50 microm sag are created through grayscale lithography, allowing for precise fabrication without the need for etching.
- The process includes simultaneous mechanical assembly features for accurate integration into miniature optical systems, enhancing their overall functionality.
- The paper discusses insights gained in designing photomasks and evaluates the lens elements based on shape, surface quality, and image quality in complete systems.
Article Abstract
Refractive microlenses with more than 50 microm sag are fabricated using grayscale lithography. Mechanical assembly features are made simultaneously alongside the microlenses to facilitate high precision assembly of miniature optical systems. The microlens elements are formed using lithographic patterning of photosensitive hybrid sol-gel glass requiring no etch transfer to the substrate material. Grayscale lithography enables the straightforward patterning of aspheric lenses and arbitrary surfaces within the material depth. Lessons learned in the design of a grayscale photomask are described. Characterization of the fabricated lens elements is reported including lens shape, surface quality, and image quality of a complete assembled imaging system.
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| http://dx.doi.org/10.1364/opex.12.001294 | DOI Listing |
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