High-resolution tomographic imaging is demonstrated using a reflection-type terahertz time-domain spectroscopy. To realize a practical system for general use, a robust all-fiber laser was used as the pump light source. Broadband terahertz waves were generated with the combination of optical pulses compressed to 17 fs using optical fibers and a DAST crystal. Using deconvolution signal processing, the wideband spectrum of the generated terahertz waves provided high-axial resolution leading to successful imaging of a multilayered structure containing a 2-microm-thin GaAs layer. To our knowledge, this is the first demonstration of terahertz tomographic imaging of such a thin layer.

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