Indium tin oxide (ITO) film has low reflectance in near infrared band while high reflectance in infrared band, and its dielectric constant can be described by Drude free-electron model. SiO film has very strong absorption at certain infrared wavelength By combining them, certain spectral selectivity can be realized. In the present paper, the authors investigated SiO/ITO films in terms of spectrum selectivity, and discussed the influence of film structure on reflection spectrum. By means of the computation of reflection spectrum with characteristic matrix, the authors found that SiO/ITO film can be used as a compatible infrared low target feature coating by properly adjusting film arrangement and selecting suitable film parameters.
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