Epitaxial ternary nitride thin films prepared by a chemical solution method.

J Am Chem Soc

Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA.

Published: November 2008

It is indispensable to use thin films for many technological applications. This is the first report of epitaxial growth of ternary nitride AMN2 films. Epitaxial tetragonal SrTiN2 films have been successfully prepared by a chemical solution approach, polymer-assisted deposition. The structural, electrical, and optical properties of the films are also investigated.

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Source
http://dx.doi.org/10.1021/ja803544cDOI Listing

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