UV second harmonic generation at 266 nm in He+ implanted beta-BaB2O4 optical waveguides.

We report on the second harmonic generation of deep UV light in beta -BaB(2)O(4) (BBO) waveguides pumped by a frequency-doubled continuous-wave Nd:YAG laser. An output power of 0.32 mW at 266 nm has been achieved for an internal pump power of 670 mW. Optical channel waveguides in BBO crystals were produced by He(+) ion implantation, lithographic masking and ion etching. The linear and nonlinear optical properties and the power handling capability of these waveguides are presented.