The electron-microscope image distortion generated by electromagnetic interference (EMI) is an important problem for accurate imaging in scanning electron microscopy (SEM). Available commercial solutions to this problem utilize sophisticated hardware for EMI detection and compensation. Their efficiency depends on the complexity of distortions influence on SEM system. Selection of a proper method for reduction of the distortions is crucial. The current investigations allowed for a separation of the distortions impact on several components of SEM system. A sum of signals from distortion sources causes wavy deformations of specimen shapes in SEM images. The separation of various reasons of the distortion is based on measurements of the periodic deformations of the images for different electron beam energies and working distances between the microscope final aperture and the specimen. Using the SEM images, a direct influence of alternating magnetic field on the electron beam was distinguished. Distortions of electric signals in the scanning block of SEM were also separated. The presented method separates the direct magnetic field influence on the electron beam below the SEM final aperture (in the chamber) from its influence above this aperture (in the electron column). It also allows for the measurement of magnetic field present inside the SEM chamber. The current investigations gave practical guidelines for selecting the most efficient solution for reduction of the distortions.

Download full-text PDF

Source
http://dx.doi.org/10.1016/j.micron.2008.01.009DOI Listing

Publication Analysis

Top Keywords

electron beam
12
magnetic field
12
sem
9
scanning electron
8
sem system
8
reduction distortions
8
current investigations
8
sem images
8
final aperture
8
electron
6

Similar Publications

Laser Wakefield Acceleration of Ions with a Transverse Flying Focus.

Phys Rev Lett

December 2024

Stanford University, Department of Mechanical Engineering, Stanford, California 94305, USA.

The extreme electric fields created in high-intensity laser-plasma interactions could generate energetic ions far more compactly than traditional accelerators. Despite this promise, laser-plasma accelerator experiments have been limited to maximum ion energies of ∼100  MeV/nucleon. The central challenge is the low charge-to-mass ratio of ions, which has precluded one of the most successful approaches used for electrons: laser wakefield acceleration.

View Article and Find Full Text PDF

The Linac Coherent Light Source (LCLS) is the world's first x-ray free electron laser. It is a scientific user facility operated by the SLAC National Accelerator Laboratory, at Stanford, for the U.S.

View Article and Find Full Text PDF

The concept of inert matrix fuel (IMF) has been proposed to utilize the energetic value of Pu and transmute minor actinides in nuclear reactors. In order to offset the initial reactivity of nuclear fuel, gadolinium (Gd) is employed as a burnable poison, owing to its high neutron absorption cross-section. To gain insights into the radiation stability and influence of grain boundaries on irradiation behaviour, 5 mol% Gd-doped ceria samples, sintered at varying temperatures, were subjected to irradiation using 400 Kr ions.

View Article and Find Full Text PDF

Terahertz reconfigurable intelligent surfaces (RIS) stand out from conventional phased arrays thanks to their unique electromagnetic properties and intelligent interconnect paradigms. They are a vital technology for terahertz wireless communication and radar detection systems. Compared with 1-bit coding metasurfaces, 2-bit coding metasurfaces offer significant advantages such as single beam steering and reduced quantization errors.

View Article and Find Full Text PDF

We report the radiation-induced darkening (RD) effect caused by X-ray radiation and the bleaching effect caused by D/H/N loading in self-developed Yb-doped large mode-area photonic crystal fibers (LMA PCFs). The decrease in the slope efficiency caused by irradiation decays exponentially with an increase in the X-ray radiation doses, and the radiation-induced gain variation (RIGV) showed a linear decay trend with increasing irradiation doses. The slope efficiency of Yb-doped LMA PCF, which significantly degraded from 71.

View Article and Find Full Text PDF

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!