We report a convenient method for the fabrication of a single metal nanowire connected with dissimilar metal electrodes and its application to chemical sensing. The method is based on a combination of atomic force microscopy nanomachining and conventional photolithography. The success of this integrated approach is confirmed by the linear current-voltage behavior of the created nanowires and comparable resistivities with those reported previously. The chemical sensing capability is demonstrated by the selective binding of a self-assembled monolayer onto a single Au nanowire connected with Ti electrodes and the subsequent resistance increase due to increased surface scattering effects after adsorption. It is found that the resistance increases by around 9% after the complete coverage of either octadecanethiol or dodecanethiol molecules onto a 20 nm thick Au nanowire. A theoretical explanation for the relationship between the resistance increase and the alkanethiol concentration is also given.
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