We report a new material combination, C/Si, for normal-incidence multilayer mirrors in the wavelength region 25-30 nm. The multilayers, fabricated by ion-beam-sputtering deposition, were characterized by near-normal-incidence reflectance measurements by using a discharge source and a grazing-incidence monochromator. The highest measured near-normal-incidence reflectance was R = 23% (25.6 nm), R = 20% (28.3 nm), R = 25% (30.4 nm) at incident angles of 10 degrees , 12 degrees , and 4 degrees , respectively. The multilayers were also characterized by transmission electron microscopy, which revealed sharp layer interfaces and low interfacial roughness.
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http://dx.doi.org/10.1364/ao.36.002839 | DOI Listing |
Micromachines (Basel)
November 2024
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion axis of electrostatic MEMS micromirrors to detect the deflection angle. The design uses a multi-layer bonding process to realize a vertical comb-driven structure.
View Article and Find Full Text PDFNucleic Acids Res
January 2025
Department of Biological Sciences, Ulsan National Institute of Science and Technology (UNIST), UNIST-gil 50, Ulsan 44919, Republic of Korea.
In a comprehensive study to decipher the multi-layered response to the chemotherapeutic agent temozolomide (TMZ), we analyzed 427 genomes and determined mutational patterns in a collection of ∼40 isogenic DNA repair-deficient human TK6 lymphoblast cell lines. We first demonstrate that the spontaneous mutational background is very similar to the aging-associated mutational signature SBS40 and mainly caused by polymerase zeta-mediated translesion synthesis (TLS). MSH2-/- mismatch repair (MMR) knockout in conjunction with additional repair deficiencies uncovers cryptic mutational patterns.
View Article and Find Full Text PDFAdv Mater
December 2024
School of Physics, and State Key Laboratory of Silicon Materials and Advanced Semiconductor Materials, Zhejiang University, Hangzhou, 310027, China.
Front Artif Intell
November 2024
Department of Computer Architecture, Universitat Politècnica de Catalunya, Barcelona, Spain.
Graph Neural Networks (GNNs) have gained considerable attention in recent years. Despite the surge in innovative GNN architecture designs, research heavily relies on the same 5-10 benchmark datasets for validation. To address this limitation, several generative graph models like ALBTER or GenCAT have emerged, aiming to fix this problem with synthetic graph datasets.
View Article and Find Full Text PDFWe report a broadband metal-dielectric dispersive mirror (MDDM) based on Al/SiO/HfO thin films operating in the near-ultraviolet (UV) region. Demonstrating the combined benefits of both the wide reflective bandwidth of aluminum in the UV region and the flexible dispersion control capability of HfO/SiO multilayer films, the MDDM has a wide bandwidth, low total thickness, and precise dispersion compensation ability. We propose an initial design based on a shortwave reflection enhancement structure (SWRES) to prevent shortwave light from obtaining a second time-dispersion compensation in the deep metal layer.
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