AI Article Synopsis
- Nano-stages are critical components in ultra-precision systems like scanning probe microscopes and optical fiber aligners, utilizing nano-scale motion for high accuracy.
- The performance of these motion stages is influenced by several factors, including hinge structure, actuation methods, and system control strategies.
- This paper presents advancements in leafspring and planar joint hinges, proposing a new composite joint hinge stage to enhance overall system performance.
Article Abstract
Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.
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