Using piezoresistive SiO2 microcantilever technology, we present an ultra-sensitive chemical sensor for trace organophosphorus vapor detection. A self-assembled composite layer of Cu2+/11-mercaptoundecanoic acid is modified on the surface of the sensing cantilever as a specific coating to capture P=O containing compounds. Experimental results indicate that the sensor can be quite sensitive to DMMP vapor (well known as a simulant of nerve agent). The signal-noise-limited detection resolution of the sensor is experimentally obtained as low as several parts per billion. Besides that the sensor can yield reversible and repeatable response to DMMP vapor, adsorption of DMMP on the self-assembled composite layer is well fit to the Langmuir isotherm model.
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