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Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip. | LitMetric

Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip.

Appl Opt

Laser Application Technology Center, Industrial Technology Reasearch Institute, Number 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan.

Published: August 2007

We present a demonstration and analysis of an industrialized design of a spatially dispersive displacement sensor, which is composed of an AlGaInP gain chip in visible range, optical assembly, and a spectrum analyzer. The sensor utilizes the spatial dispersion of focus from the optical assembly and wavelength spectrum's deviation induced by the displacement of the target. As a result, the sensor delivers a quick and simple way of measuring displacement. By adapting the magnification and resolution of the optical assembly, a displacement sensor with a middle measurement range, ~10 microm, was obtained. However, we should note that 25 nm resolution is limited by the bandwidth and temperature fluctuation of the gain chip.

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Source
http://dx.doi.org/10.1364/ao.46.006218DOI Listing

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