AI Article Synopsis
- The study presents microfabricated Fabry-Perot cavities using cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors along with silicon-on-insulator rib waveguides.
- Several configurations of DBR and cavity lengths were tested, showing impressive performance metrics including a Q factor of 26,963 and a finesse of 489.
- The devices also exhibit effective thermo-optic tuning capabilities, allowing adjustments over a range of 6.7 nm.
Article Abstract
We demonstrate in-plane microfabricated Fabry-Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q=26963, FWHM=0.060 nm, finesse F=489, free spectral range FSR=81.7 nm, and DBR mirror reflectance R=99.4%. Thermo-optic tuning over 6.7 nm is also demonstrated.
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| http://dx.doi.org/10.1364/ol.32.000533 | DOI Listing |
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