A series of comparative Raman study of carbon nanotubes arrays prepared by thermal chemical vapor deposition are reported. The results suggest that the G mode and D mode of carbon nanotubes (CNTs) arrays are all downshifted as compared to that of polycrystalline graphite, and the shifted number in well-aligned CNTs arrays is more than that in misaligned CNTs arrays. Moreover, the intensity ratio ID/IG indicates the ordering in CNTs arrays. A lower ID/IG means a higher graphitization and less amorphous carbon in CNTs arrays.
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