The enhancement effects in X-ray fluorescence analysis for multi-layer samples were studied. A computer program was developed based on the theoretical equations for X-ray fluorescence intensity calculation and used to calculate the intensities of primary fluorescence and secondary fluorescence, the ratios of intensities of secondary fluorescence to primary fluorescence, and the portions of intensities of secondary fluorescence in total fluorescence for Fe Kalpha line in Zn/Fe and Fe/Zn film samples. It was found that the intensities of a characteristic line of an element in primary fluorescence and secondary fluorescence, the ratios of intensities of secondary fluorescence to primary fluorescence, and the portions of intensities of secondary fluorescence in total fluorescence were dependent not only on the thickness of the films but also on the position of the films in case of constant excitation conditions when multi-layer samples were tested by X-ray fluorescence analysis. When the thickness of Zn layer is the same as that of Fe layer, the calculated ratio of intensity of secondary fluorescence to total fluorescence of Fe Kalpha varies with the thickness, and reaches up to 9% for Fe/Zn sample while up to 35% for Zn/Fe sample.
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