Multi-degree-of-freedom ultrasonic actuator has been studied for robot arms and multidimensional precision table and so on because of its simple structure, silent operation, and holding force. In this study, we aim to miniaturize multi-degree-of-freedom ultrasonic actuator for fabrication on a substrate. This actuator consists of a stainless steel cylinder and a PZT ring. The cylinder is fixed on a substrate and the PZT ring is glued to the substrate near the cylinder. The 1st longitudinal vibration and the 2nd bending vibration are simultaneously excited in the cylinder to make elliptical motion at the top of the cylinder and a ball rotor placed on the cylinder rotates because of the friction force. Length of the cylinder was decided so as to tune the resonance frequency of the 1st longitudinal vibration to the 2nd bending one. Actuator performances are evaluated experimentally using a 14 mm height and 7 mm diameter stainless steel cylinder with a 0.5 mm thickness PZT ring. The rotation about the cylinder axis is tested using the two orthogonal bending vibrations with 90 degrees phase difference. Also, the rotation about horizontal axes were investigated using the combination of the longitudinal vibration and one of two bending vibrations. We measured the rotation speed of a steel ball and obtained 15.8 rps using a 6 mm diameter ball rotor.
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