The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees , we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.
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| http://dx.doi.org/10.1364/ao.45.003935 | DOI Listing |
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