Deterministic positioning of three-dimensional structures on a substrate by film growth.

A process to fabricate three-dimensional crystalline structures at controlled locations on a substrate during film growth and annealing is demonstrated. Low-energy electron microscopy reveals that silver is transported to regions on a tungsten surface with closely spaced atomic steps. By controlling the substrate topography using a focused ion beam to machine small holes, this general mechanism produces an array of cylinders as a silver film dewets the substrate.