Nanocrystalline indium oxide (In2O3)-doped tin oxide (SnO2) thin film sensor has been sol-gel dip-coated on a microelectrochemical system (MEMS) device using a sol-gel dip-coating technique. Hydrogen (H2) at ppm-level has been successfully detected at room temperature using the present MEMS-based sensor. The room temperature H2 sensing characteristics (sensitivity, response and recovery time, and recovery rate) of the present MEMS-based sensor has been investigated as a function of air-pressure (50-600 Torr) with and without the ultraviolet (UV) radiation exposure. It has been demonstrated that, the concentration of the surface-adsorbed oxygen-ions (which is related to the sensor-resistance in air), the ppm-level H2, and the oxygen (O2) partial pressure are the three major factors, which determine the variation in the room temperature H2 sensing characteristics of the present MEMS-based sensor as a function of air-pressure.
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