Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers.

Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose shape is optimized by both temporal apodization of the received signal and spatial apodization of the transducer aperture. Strong imaging artifacts resulting from the generation and detection of edge waves are eliminated in this way. It is shown by several examples that only a broadband system can be utilized in order to obtain a line-shaped PSF suitable for imaging.