Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry-Perot cavity.

A phase-shifting interferometry (PSI) with equal phase steps by use of a frequency-tunable diode laser and a Fabry-Perot cavity is proposed for the Carré algorithm. The measurement accuracy of the Carré algorithm depends on the equality of the phase steps. Using the Fabry-Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 5.1 x 10(-5) and a measurement repeatability of lambda/800.