We report a cost-effective fabrication method, with a combination of the sample-inverted reflow technique and the soft-lithography replication method, to fabricate conicoid refractive microlens arrays (MLAs), including hyperboloid, paraboloid, and ellipsoid MLAs in inorganic-organic hybrid SiO2-ZrO2 solgel material. The fabrication procedures involve two basic steps. First, a master of the conicoid MLA was made in photoresist by the sample-inverted reflow technique. Second, we built a negative mold of the master by casting polydimethylsiloxane (PDMS) onto a silicone elastomer against the master, and then the profile was imprinted onto the solgel glass. As a result, the fabricated solgel MLAs have been obtained with excellent smooth profiles, having negligible discrepancies from the profiles of ideal conicoid MLAs.
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Hybrid sample-inverted reflow and soft-lithography technique for fabrication of conicoid microlens arrays.
Appl Opt
July 2005
Photonics Research Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798.
We report a cost-effective fabrication method, with a combination of the sample-inverted reflow technique and the soft-lithography replication method, to fabricate conicoid refractive microlens arrays (MLAs), including hyperboloid, paraboloid, and ellipsoid MLAs in inorganic-organic hybrid SiO2-ZrO2 solgel material. The fabrication procedures involve two basic steps. First, a master of the conicoid MLA was made in photoresist by the sample-inverted reflow technique.
View Article and Find Full Text PDFSample-inverted reflow technique for fabrication of a revolved-hyperboloid microlens array in hybrid solgel glass.
Opt Lett
September 2004
Photonics Research Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798.
We propose a novel fabrication method, which is referred to as the sample-inverted reflow technique, to fabricate a refractive microlens array (MLA) with a revolved-hyperboloid profile in a solgel material. The fabricated solgel MLA demonstrates an excellent smooth profile with a fabrication error much less than the difference between the revolved hyperboloid and the spherical surface. In an application of coupling a laser diode (LD) to a single-mode fiber (SMF), we propose a two-MLA coupling scheme in which two revolved-hyperboloid MLAs are used between the LD and the SMF.
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