AI Article Synopsis
- Nanostructures can be created by using focused electron or ion beams on stable, thin films of water ice deposited on silicon.
- These patterns enable the fabrication of very narrow metal lines (less than 20 nm) and precise chemical surface changes (below 10 nm).
- The study suggests that solid-phase condensed gases with low sublimation energy, like water ice, are excellent materials for nanoscale patterning.
Article Abstract
Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.
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|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC1432218 | PMC |
| http://dx.doi.org/10.1021/nl050405n | DOI Listing |
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