Single-chip mechatronic microsystem for surface imaging and force response studies.

Proc Natl Acad Sci U S A

Physical Electronics Laboratory, Swiss Federal Institute of Technology, Hoenggerberg HPT-H4.2, Wolfgang-PauliStrasse 16, 8093 Zurich, Switzerland.

Published: December 2004

We report on a stand-alone single-chip (7 x 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of < 1 nm and a force resolution of < 1 nN as shown in the measurement results. The monolithic system represents a paradigm of a mechatronic microsystem that allows for precise and fully controlled mechanical manipulation in the nanoworld.

Download full-text PDF

Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC535376PMC
http://dx.doi.org/10.1073/pnas.0405725101DOI Listing

Publication Analysis

Top Keywords

mechatronic microsystem
8
atomic force
8
force microscopy
8
single-chip mechatronic
4
microsystem surface
4
surface imaging
4
force
4
imaging force
4
force response
4
response studies
4

Similar Publications

An integrated magnetoimpedance biosensor microfluidic magnetic platform for the evaluation of the cardiac marker cTnI.

Anal Methods

January 2025

Microelectronic Research & Development Center, School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200444, China.

An integrated magnetoimpedance (MI) biosensor microfluidic magnetic platform was proposed for the evaluation of the cardiac marker, cardiac troponin I (cTnI). This bioanalyte evaluation platform mainly comprised three external permanent magnets (PMs), one MI element, two peelable SiO film units and a microfluidic chip (MFC). The MI element was made of micro-electro-mechanical system (MEMS)-based multilayered [Ti (6 nm)/FeNi (100 nm)]/Cu (400 nm)/[Ti (6 nm)/FeNi (100 nm)] thin films and designed as meander structures with closed magnetic flux.

View Article and Find Full Text PDF

Self-assembled peptide microtubes (SPMTs)/SnO sensors for enhanced room-temperature gas detection under visible light illumination.

Talanta

December 2024

Engineering Research Center of Smart Microsensors and Microsystems, Ministry of Education, College of Electronics and Information, Hangzhou Dianzi University, Hangzhou, Zhejiang, 310018, China; China-Israel Polypeptide Device and Application Technology Joint Research Center, Hangzhou, 310027, China. Electronic address:

Nitrogen dioxide (NO) is an important contaminant that poses a severe threat to environmental sustainability. Traditional inorganic NO gas detectors are generally used under harsh operating conditions and employ environmentally unfriendly resources, thus preventing widespread practical applications. Herein, self-assembled peptide microtubes (SPMTs) are combined with SnO nanoparticles (NPs) to develop a bioinspired NO gas sensor.

View Article and Find Full Text PDF

Quantitative Identification of Dopant Occupation in Li-Rich Cathodes.

Adv Mater

November 2024

Institute of Advanced Battery Materials and Devices, College of Materials Science and Engineering, Beijing University of Technology, Beijing, 100124, P. R. China.

Elemental doping is widely used to improve the performance of cathode materials in lithium-ion batteries. However, macroscopic/statistical investigation on how doping sites are distributed in the material lattice, despite being a key prerequisite for understanding and manipulating the doping effect, has not been effectively established. Herein, to solve this predicament, a universal strategy is proposed to quantitatively identify the locations of Al and Mg dopants in lithium-rich layered oxides (LLOs).

View Article and Find Full Text PDF

Exploring the dynamic evolution of lattice oxygen on exsolved-MnO@SmMnO interfaces for NO Oxidation.

Nat Commun

September 2024

State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry, Jilin University, Changchun, PR China.

Article Synopsis
  • Lattice oxygen in metal oxides is crucial for diesel oxidation catalysts, but its structural changes during catalysis are not fully understood.
  • A new MnO/SmMnO catalyst was developed using a specific method that enhances the bond strength and electron density at manganese sites, leading to more reactive lattice oxygen.
  • Testing shows that this catalyst not only oxidizes NO more effectively but also withstands degradation better than traditional Pt/AlO catalysts due to its ability to undergo reversible changes during chemical reactions.
View Article and Find Full Text PDF

Reverse Hydrogen Spillover on Metal Oxides for Water-Promoted Catalytic Oxidation Reactions.

Adv Mater

September 2024

Department of Mechanical and Mechatronics Engineering, Waterloo Institute for Nanotechnology, Materials Interface Foundry, University of Waterloo, Waterloo, N2L 3G1, Canada.

Article Synopsis
  • Understanding the interaction between water and metal oxide surfaces is essential for addressing water poisoning in catalytic reactions, specifically in ethanol oxidation.
  • This research demonstrates that water promotes the function of metal oxides, where the competition between water-dissociated *OH and O at Sn active sites leads to water poisoning, while CoO-SnO enhances water resistance.
  • The combination of carbon materials with CoO improves proton transport, facilitating the activation of O on SnO and increasing the efficiency of the ethanol oxidation reaction by 60 times in humid conditions.
View Article and Find Full Text PDF

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!