The use of linear transport theory to calculate several observable quantities in the sputtering process is reviewed. The basic equations previously solved in the literature to obtain the sputtering yield and the energy spectra of sputtered atoms are re-derived and briefly analysed. Comparison with experiments and comments on limitations of theoretical models are included.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1098/rsta.2003.1305 | DOI Listing |
Publication Analysis
Top Keywords
transport theories
4
theories sputtering
4
sputtering linear
4
linear transport
4
transport theory
4
theory calculate
4
calculate observable
4
observable quantities
4
quantities sputtering
4
sputtering process
4
Similar Publications
Want AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!