Sputtering: survey of observations and derived principles.

Philos Trans A Math Phys Eng Sci

Laboratory for Atomic and Surface Physics, University of Virginia, Charlottesville, VA 22904, USA.

Published: January 2004

We review the most salient observations and physical principles of knock-on and electronic sputtering and the role of sputtering in several astrophysical settings and applications in research and technology. In addition, we emphasize some unsolved problems, propose experiments and provide guides to representative literature reviews and significant recent publications.

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Source
http://dx.doi.org/10.1098/rsta.2003.1301DOI Listing

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