A total internal reflection (TIR)-based biochip utilizing a polymer-filled cavity with a micromirror sidewall has been designed and fabricated. The implementation of the micromirror sidewall cavity facilitates precise alignment of the excitation light beam into the system. The incident angle of illumination can be easily modified by selecting polymers of different indices of refraction while optical losses are minimized. The design enables the hybrid, vertical integration of a laser diode and a CCD camera, resulting in a compact optical system. Brownian motion of fluorescent microspheres and real-time photobleaching of rhodamine 6G molecules is demonstrated. The proposed TIR-based chip simplifies current TIR optical configurations and could potentially be used as an optical-microfluidic platform for an integrated lab-on-a-chip microsystem.
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http://dx.doi.org/10.1039/b311088e | DOI Listing |
Micromachines (Basel)
March 2016
Mechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA.
Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force.
View Article and Find Full Text PDFJ Microsc
February 2012
Department of Systems Design Engineering, University of Waterloo, Waterloo, Ontario, Canada.
This paper presents microelectromechanical system micromirrors with sidewall electrodes applied for use as a Confocal MACROscope for biomedical imaging. The MACROscope is a fluorescence and brightfield confocal laser scanning microscope with a very large field of view. In this paper, a microelectromechanical system mirror with sidewall electrodes replaces the galvo-scanner and XYZ-stage to improve the confocal MACROscope design and obtain an image.
View Article and Find Full Text PDFAppl Opt
November 2009
Institute of Mechanical and Electrical Engineering, Ming-Chi University of Technology, 84 Gungjuan Road, Taishan, Taipei 24301, Taiwan.
This paper successfully used inclined exposure technology to fabricate 45 degrees polymer optical grade micromirrors (approximately 1.4 mm thick) while applying the surface free energy minimization principle to improve sidewall indentation. This paper tests the effect of the reflow process on the surface roughness of inclined surfaces.
View Article and Find Full Text PDFWe introduce Cu metal-organic chemical-vapor deposition as a potential means of conformal metal coating of the sidewalls of micromachined vertical mirrors. The optimal process temperature was experimentally found to be 215 degrees C, which gives high step coverage of better than 90%, and the surface roughness was less than 27 nm. The roughness, measured with an atomic force microscope, will induce a scattering loss less than 0.
View Article and Find Full Text PDFLab Chip
April 2004
Berkeley Sensor and Actuator Center, Department of Bioengineering, University of California, Berkeley, USA.
A total internal reflection (TIR)-based biochip utilizing a polymer-filled cavity with a micromirror sidewall has been designed and fabricated. The implementation of the micromirror sidewall cavity facilitates precise alignment of the excitation light beam into the system. The incident angle of illumination can be easily modified by selecting polymers of different indices of refraction while optical losses are minimized.
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