rf Electrode sheath formation near a concave electrode.

Phys Rev Lett

Plasma Physics Department, St. Petersburg State Polytechnical University, Polytechnicheskaya 29, St. Petersburg 195251, Russia.

Published: February 2004

In this work we present experimental results concerning electrode sheath and ion flux formation near a concave electrode with the dimension of a cavity comparable to the electrode sheath length. It is shown that the secondary electron emission can play a crucial role in plasma molding over the electrode surface. It is also observed that plasma has a tendency to "self-leakage" in electrode cavities.

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http://dx.doi.org/10.1103/PhysRevLett.92.055001DOI Listing

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