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The design of the illumination optics for high numerical aperture (NA) anamorphic extreme ultraviolet (EUV) projection optics is a critical challenge to EUV lithography in advanced technology node. However, the EUV illumination optics design using conventional methods have flaws in illumination efficiency and illumination uniformity due to the limitations of relay configuration and matching method that can only consider one factor affecting illumination uniformity. One-mirror configuration can improve illumination efficiency by reducing the number of mirrors.
View Article and Find Full Text PDFShannon Entropy Computations in Navier-Stokes Flow Problems Using the Stochastic Finite Volume Method.
Entropy (Basel)
January 2025
Faculty of Civil Engineering, Architecture and Environmental Engineering, Lodz University of Technology, 90-924 Łódź, Poland.
The main aim of this study is to achieve the numerical solution for the Navier-Stokes equations for incompressible, non-turbulent, and subsonic fluid flows with some Gaussian physical uncertainties. The higher-order stochastic finite volume method (SFVM), implemented according to the iterative generalized stochastic perturbation technique and the Monte Carlo scheme, are engaged for this purpose. It is implemented with the aid of the polynomial bases for the pressure-velocity-temperature (PVT) solutions, for which the weighted least squares method (WLSM) algorithm is applicable.
View Article and Find Full Text PDFA novel multiple directional shearing interferometry system with synchronous polarization phase shifting.
Sci Rep
January 2025
School of Opto-electronics Engineering, Xi'an Technological University, Xi'an, 710021, China.
This paper explores a multi-directional (multiple directional) shearing synchronous polarization phase-shifting interferometer that utilizes a birefringent crystal displacer. This design effectively mitigates nonlinear issues and environmental influences commonly encountered in synchronous phase-shifting interferometry. Additionally, it enables the acquisition of shear wavefront information from multiple directions.
View Article and Find Full Text PDFParameter uniform finite difference formulation with oscillation free for solving singularly perturbed delay parabolic differential equation via exponential spline.
BMC Res Notes
January 2025
Department of Mathematics, Jimma University, Jimma, Ethiopia.
Objective: In this work, singularly perturbed time dependent delay parabolic convection-diffusion problem with Dirichlet boundary conditions is considered. The solution of this problem exhibits boundary layer at the right of special domain. In this layer the solution experiences steep gradients or oscillation so that traditional numerical methods may fail to provide smooth solutions.
View Article and Find Full Text PDFApplication of modern artificial intelligence techniques in the development of organic molecular force fields.
Phys Chem Chem Phys
January 2025
Institute of Materials Research (IMR), Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, China.
The molecular force field (FF) determines the accuracy of molecular dynamics (MD) and is one of the major bottlenecks that limits the application of MD in molecular design. Recently, artificial intelligence (AI) techniques, such as machine-learning potentials (MLPs), have been rapidly reshaping the landscape of MD. Meanwhile, organic molecular systems feature unique characteristics, and require more careful treatment in both model construction, optimization, and validation.
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